Chamber Atmosphere Furnaces

Introduction

The chamber atmosphere furnace ensures that the oxygen content in the furnace is reduced to a minimum by pre-evacuating, and then inert gases such as nitrogen and argon are introduced to obtain an ideal heat treatment environment under atmosphere protection. because

Its excellent atmosphere environment and compact practicality have been widely used in materials laboratories or small batch production of semiconductors, silicon nitride and other products.

Features

● RT～1700℃.

● The furnace is made of alumina polycrystalline fiber, which has a constant temperature field and no pollution.

● Fully enclosed structure furnace, double-layer thickened steel shell, ultimate vacuum up to - 0.1Mpa.

● The top, left side, right side and back are all made of 12mm solid square steel as reinforcement, which will not deform under vacuum. The maximum vacuum degree can reach -0.08MPa.

● The temperature control system adopts industrial precision 0.2 level intelligent instrument, PID adjustment, and 50-segment programming.

● The furnace door has good sealing performance, four handwheels lock the furnace door tightly, and the silicone ring seals it.

Standard Accessories

Furnace door block fire brick ( except 1200 model) ;

high temperature gloves;

crucible pliers;

instruction manual;

two heating elements ( except 1200 model), rotary vane vacuum pump;

Optional Accessories

● Direct connected vacuum pump

● Touch screen/computer connection software

● Furnace crucible (multi-layer kiln furniture)

● Heating element (silicon molybdenum rod, silicon carbon rod)

● Gas system (float/proton flow meter, 2-way/3-way gas)

Technical Parameters

Standard specifications: Type 1200

Standard specifications: Type 1400

Standard specifications: Type 1700