Vertical tube furnace

Introduction

Depending on the temperature, the furnace tube is made of high-purity quartz or high-purity alumina, and is equipped with a vacuum sealing flange system. It is mainly suitable for pre-sintering, sintering, coating, and high-temperature heating of materials in vacuum or protective atmospheres at various temperature ranges. Solution to low-temperature deposition (CVD) process, preparation of carbon nanotubes and silicon nanowires, etc.

Features

● Maximum temperature :

1200 ℃ ( HRE resistance wire heating)

1400 ℃ (silicon carbon rod heating)

1600 ℃ (silicon molybdenum rod heating)

● Intelligent 50 - segment programmable automatic control .

● Furnace shell structure, double-layer air-cooling structure ; surface temperature is lower than 50 ℃.

● The furnace adopts high-quality alumina polycrystalline fiber inorganic material formed by vacuum adsorption using Japanese technology, which has excellent thermal insulation performance.

● 304 stainless steel double-layer sealing flange.

● Adjustable flange support structures at both ends extend the service life of the furnace tube.

● Over-temperature protection function, automatically cuts off power when the temperature exceeds the allowed set value.

● Safety protection: Automatically cut off power when the furnace body leaks electricity.

● Heating rate ≦20 ℃ /min .

● Temperature control accuracy ±1 °C.

● Maximum vacuum degree -0.1MPa .

● Molecular pump unit can be configured, and the vacuum degree can reach 7x10 -4 Pa.

Standard accessories

●  4 pipe plugs; 1 thermocouple; 1 furnace tube; 1 vacuum pump .

●  1 set of vacuum flange; 1 vacuum pressure gauge .

Technical Parameters